Inventor
Matt Hankinson
Inventor
San Jose, CA, US
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices30%
G01NInvestigating or analysing materials by determining their chemical or physical properties25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests20%
PatentTitleYear
7,767,956'Methods and systems for lithography process control'20107,462,814'Methods and systems for lithography process control'20087,352,453'Method for process optimization and control by comparison between 2 or more measured scatterometry signals'20086,987,572'Methods and systems for lithography process control'20066,689,519'Methods and systems for lithography process control'20046,673,638'Method and apparatus for the production of process sensitive lithographic features'2004Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2004–2010Patents assigned to KLA TENCOR TECH CORP (5)· patent assignee history
2004Patents assigned to KLA TENCOR CORP (1)· patent assignee history
2004–2010Based in San Jose, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KLA TENCOR TECH CORP | 5 | 2004–2010 |
| KLA TENCOR CORP | 1 | 2004 |
Locations
| Location | Patents | Span |
|---|---|---|
| San Jose, California, US | 6 | 2004–2010 |