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Inventor

Tatsuro Ohshita

Inventor
Miyagi, JP

Overview

7→
Patents
2014–2021
Patent span
Electricity
Primary field (CPC H)

Patents· 7 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps40%
C23CCoating metallic material20%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1020%
H01LSemiconductor devices13%
H05HPlasma technique7%
PatentTitleYear
11,133,157Plasma processing apparatus202110,553,407Plasma processing method and plasma processing apparatus202010,297,428Plasma processing apparatus20199,978,566Plasma etching method20189,343,295'Vaporizing unit, film forming apparatus, film forming method, computer program and storage medium'20169,252,001'Plasma processing apparatus, plasma processing method and storage medium'20168,636,871'Plasma processing apparatus, plasma processing method and storage medium'2014

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2014–2021Patents assigned to TOKYO ELECTRON LTD (7)· patent assignee history
2014Patents assigned to KANG SONGYUN (1)· patent assignee history
2014Patents assigned to MATSUZAKI KAZUYOSHI (1)· patent assignee history
2014Patents assigned to OHSHITA TATSURO (1)· patent assignee history
2014Patents assigned to SAWADA IKUO (1)· patent assignee history
2014–2016Based in Nirasaki, JP· patent location history
2018–2021Based in Miyagi, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD72014–2021
KANG SONGYUN12014
MATSUZAKI KAZUYOSHI12014
OHSHITA TATSUROself12014
SAWADA IKUO12014
Locations
LocationPatentsSpan
Miyagi, JP42018–2021
Nirasaki, JP32014–2016