Inventor
Adrianus Franciscus Petrus Engelen
Inventor
Waalre, NL
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices73%
G02BOptical elements, systems or apparatus13%
G01NInvestigating or analysing materials by determining their chemical or physical properties7%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h107%
PatentTitleYear
10,222,703Lithographic apparatus and method20199,964,853Method of determining dose and focus, inspection apparatus, patterning device, substrate and device manufacturing method20189,778,575'Lithographic apparatus and method'20179,285,685'Lithographic apparatus and device manufacturing method'20169,250,536'Lithographic apparatus and method'20168,937,706'Lithographic apparatus and method'20158,711,330'Lithographic apparatus and device manufacturing method'20147,961,293'Lithographic apparatus and device manufacturing method'20117,724,351'Lithographic apparatus, device manufacturing method and exchangeable optical element'20107,352,435'Lithographic apparatus and device manufacturing method'20086,809,797'Lithographic apparatus, device manufacturing method, and device manufactured thereby'2004Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2004–2019Patents assigned to ASML NETHERLANDS BV (11)· patent assignee history
2004Based in Eindhoven, NL· patent location history
2008–2014Patents assigned to ZEISS CARL SMT AG (3)· patent assignee history
2008–2019Based in Waalre, NL· patent location history
2014–2016Patents assigned to BASELMANS JOHANNES JACOBUS MATHEUS (3)· patent assignee history
2014–2016Patents assigned to ENGELEN ADRIANUS FRANCISCUS PETRUS (3)· patent assignee history
2015–2016Patents assigned to EURLINGS MARKUS FRANCISCUS ANTONIUS (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 11 | 2004–2019 |
| BASELMANS JOHANNES JACOBUS MATHEUS | 3 | 2014–2016 |
| ENGELEN ADRIANUS FRANCISCUS PETRUSself | 3 | 2014–2016 |
| ZEISS CARL SMT AG | 3 | 2008–2014 |
| EURLINGS MARKUS FRANCISCUS ANTONIUS | 2 | 2015–2016 |
Locations
| Location | Patents | Span |
|---|---|---|
| Waalre, NL | 10 | 2008–2019 |
| Eindhoven, NL | 1 | 2004 |