Inventor
Kurt Lehman
Inventor
Menlo Park, CA, US
Overview
Patents· 20 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B24Bprimary
B24BMachines, devices, or processes for grinding or polishing34%
G01NInvestigating or analysing materials by determining their chemical or physical properties28%
H04NPictorial communication, e.g. television10%
H10FInorganic semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation7%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h107%
B24DTools for grinding, buffing or sharpening3%
G01BMeasuring length, thickness or similar linear dimensions3%
G01RMeasuring electric variables3%
H01LSemiconductor devices3%
PatentTitleYear
10,724,964Multi-sensor tiled camera with flexible electronics for wafer inspection20209,462,206'Integrated multi-channel analog front end and digitizer for high speed imaging applications'20168,831,767'Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool'20148,754,972'Integrated multi-channel analog front end and digitizer for high speed imaging applications'20148,010,222'Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool'20117,332,438'Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool'20087,175,503'Methods and systems for determining a characteristic of polishing within a zone on a specimen from combined output signals of an eddy current device'20077,096,752'Environmental damage reduction'20067,070,476'In-situ metalization monitoring using eddy current measurements during the process for removing the film'20067,052,369'Methods and systems for detecting a presence of blobs on a specimen during a polishing process'20067,030,018'Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool'20066,935,922'Methods and systems for generating a two-dimensional map of a characteristic at relative or absolute locations of measurement spots on a specimen during polishing'20056,885,190'In-situ metalization monitoring using eddy current measurements during the process for removing the film'20056,884,146'Systems and methods for characterizing a polishing process'20056,866,559'Windows configurable to be coupled to a process tool or to be disposed within an opening in a polishing pad'20056,707,540'In-situ metalization monitoring using eddy current and optical measurements'20046,628,397'Apparatus and methods for performing self-clearing optical measurements'20036,621,264'In-situ metalization monitoring using eddy current measurements during the process for removing the film'20036,433,541'In-situ metalization monitoring using eddy current measurements during the process for removing the film'20025,552,704'Eddy current test method and apparatus for measuring conductance by determining intersection of lift-off and selected curves'1996Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1996Based in San Mateo, CA, US· patent location history
2002–2020Patents assigned to KLA TENCOR CORP (8)· patent assignee history
2002–2020Based in Menlo Park, CA, US· patent location history
2005–2014Patents assigned to KLA TENCOR TECH CORP (9)· patent assignee history
2014Patents assigned to LEHMAN KURT (2)· patent assignee history
2014Patents assigned to ALLEN RONALD L (1)· patent assignee history
2014Patents assigned to BEVIS CHRISTOPHER F (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KLA TENCOR TECH CORP | 9 | 2005–2014 |
| KLA TENCOR CORP | 8 | 2002–2020 |
| LEHMAN KURTself | 2 | 2014 |
| ALLEN RONALD L | 1 | 2014 |
| BEVIS CHRISTOPHER F | 1 | 2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Menlo Park, California, US | 19 | 2002–2020 |
| San Mateo, California, US | 1 | 1996 |