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Inventor

Matthias Zierbock

Inventor
Graitschen, DE

Overview

1→
Patents
2003
Patent span
Electricity
Primary field (CPC H)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps100%
PatentTitleYear
6,635,884'Method for directing an electron beam onto a target position on a substrate surface'2003

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2003Patents assigned to LEICA MICROSYS LITHOGRAPHY LTD (1)· patent assignee history
2003Based in Graitschen, DE· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
LEICA MICROSYS LITHOGRAPHY LTD12003
Locations
LocationPatentsSpan
Graitschen, DE12003