Inventor
Masahito Ishihara
Inventor
Fuchu, JP
Overview
Patents· 15 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material23%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1023%
H01JElectric discharge tubes or discharge lamps13%
H02NElectric machines not otherwise provided for13%
B21KMaking forged or pressed metal products, e.g. horse-shoes, rivets, bolts or wheels3%
B62DMotor vehicles3%
F01LCyclically operating valves for machines or engines3%
F27BFurnaces, kilns, ovens or retorts in general3%
H01LSemiconductor devices3%
H10DInorganic electric semiconductor devices3%
PatentTitleYear
10,738,380Deposition apparatus20207,848,077'Electrostatic chuck device'20107,791,857'Electrostatic chuck device'20107,724,493'Electrostatic chuck device'20107,623,334'Electrostatic chuck device'20097,159,537'Device for fixing a gas showerhead or target plate to an electrode in plasma processing systems'20077,019,263'Substrate heating apparatus and multi-chamber substrate processing system'20066,129,046'Substrate processing apparatus'20006,070,552'Substrate processing apparatus'20005,956,616'Method of depositing thin films by plasma-enhanced chemical vapor deposition'19995,944,968'Sputtering apparatus'19995,925,227'Multichamber sputtering apparatus'19995,624,499'CVD apparatus'19974,768,268'Method for manufacturing a single-piece type valve sleeve'19884,617,883'Pivot members for a cam follower of valve mechanism for internal combustion engine'1986Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1986–1988Patents assigned to TOKAI TRW & CO (2)· patent assignee history
1986Patents assigned to HONDA MOTOR CO LTD (1)· patent assignee history
1986–1988Based in Kani, JP· patent location history
1997–2007Patents assigned to ANELVA CORP (8)· patent assignee history
1997–2020Based in Fuchu, JP· patent location history
1999–2006Based in Tokyo, JP· patent location history
2009–2020Patents assigned to CANON ANELVA CORP (5)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ANELVA CORP | 8 | 1997–2007 |
| CANON ANELVA CORP | 5 | 2009–2020 |
| TOKAI TRW & CO | 2 | 1986–1988 |
| HONDA MOTOR CO LTD | 1 | 1986 |
Locations
| Location | Patents | Span |
|---|---|---|
| Fuchu, JP | 9 | 1997–2020 |
| Tokyo, JP | 4 | 1999–2006 |
| Kani, JP | 2 | 1986–1988 |