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Inventor

Yan Chen

Inventor
Santa Clara, CA, US

Overview

33→
Patents
2008–2020
Patent span
Physics
Primary field (CPC G)

Patents· 33 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G02Bprimary
G02BOptical elements, systems or apparatus26%
G01NInvestigating or analysing materials by determining their chemical or physical properties13%
H04NPictorial communication, e.g. television13%
G06FElectric digital data processing10%
H01LSemiconductor devices10%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1010%
H01JElectric discharge tubes or discharge lamps5%
G01BMeasuring length, thickness or similar linear dimensions3%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light3%
G03BApparatus or arrangements for taking photographs or for projecting or viewing them3%
PatentTitleYear
10,837,902Optical sensor for phase determination202010,473,525Spatially resolved optical emission spectroscopy (OES) in plasma processing201910,453,653Endpoint detection algorithm for atomic layer etching (ALE)201910,332,861Interconnection structures and methods for making the same201910,205,520Method and device for measuring optical signal-to-noise ratio201910,002,804Method of endpoint detection of plasma etching process using multivariate analysis20189,970,818Spatially resolved optical emission spectroscopy (OES) in plasma processing20189,857,558'Optical imaging lens'20189,851,532Mobile device and optical imaging lens thereof20179,798,108'Mobile device and optical imaging lens thereof'20179,786,634'Interconnection structures and methods for making the same'20179,772,471'Mobile device and optical imaging lens thereof'20179,645,360'Mobile device and optical imaging lens thereof'20179,557,525'Mobile device and optical imaging lens thereof'20179,541,731'Mobile device and optical imaging lens thereof'20179,541,734'Mobile device and optical imaging lens thereof'20179,513,534'Mobil device and optical imaging lens having four lens elements thereof'20169,377,602'Imaging lens, and electronic apparatus including the same'20169,341,816'Mobile device and optical imaging lens thereof'20169,330,990'Method of endpoint detection of plasma etching process using multivariate analysis'20169,264,594'Mobile device and optical imaging lens thereof'20169,217,843'Mobile device and optical imaging lens thereof'20159,217,846'Imaging lens, and electronic apparatus including the same'20159,217,848'Mobile device and optical imaging lens thereof'20158,929,000'Mobile device and optical imaging lens thereof'20158,346,506'Transforming metrology data from a semiconductor treatment system using multivariate analysis'20138,170,833'Transforming metrology data from a semiconductor treatment system using multivariate analysis'20127,522,294'Measuring a process parameter of a semiconductor fabrication process using optical metrology'20097,523,021'Weighting function to enhance measured diffraction signals in optical metrology'20097,505,148'Matching optical metrology tools using spectra enhancement'20097,467,064'Transforming metrology data from a semiconductor treatment system using multivariate analysis'20087,428,044'Drift compensation for an optical metrology tool'20087,327,475'Measuring a process parameter of a semiconductor fabrication process using optical metrology'2008

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2008–2020Patents assigned to TOKYO ELECTRON LTD (13)· patent assignee history
2008–2019Based in Santa Clara, CA, US· patent location history
2012–2013Patents assigned to BAO JUNWEI (2)· patent assignee history
2012–2013Patents assigned to CHEN YAN (2)· patent assignee history
2015–2018Patents assigned to GENIUS ELECTRONIC OPTICAL CO LTD (16)· patent assignee history
2015–2018Based in Xiamen, CN· patent location history
2015–2017Based in Fujian, CN· patent location history
2017–2018Patents assigned to GENIUS ELECTRONIC OPTICAL XIAMEN CO LTD (3)· patent assignee history
2017–2019Based in Taipei, TW· patent location history
2018–2019Based in Cupertino, CA, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
GENIUS ELECTRONIC OPTICAL CO LTD162015–2018
TOKYO ELECTRON LTD132008–2020
GENIUS ELECTRONIC OPTICAL XIAMEN CO LTD32017–2018
BAO JUNWEI22012–2013
CHEN YANself22012–2013
Locations
LocationPatentsSpan
Santa Clara, California, US112008–2019
Xiamen, CN82015–2018
Fujian, CN72015–2017
Cupertino, California, US22018–2019
Taipei, TW22017–2019