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Inventor

Yuezhu YANG

Inventor
CN

Overview

1→
Patents
2025
Patent span
Physics
Primary field (CPC G)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G01Bprimary
G01BMeasuring length, thickness or similar linear dimensions33%
G02BOptical elements, systems or apparatus33%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices33%
PatentTitleYear
12,346,030Device and method for regulating and controlling incident angle of light beam in laser interference lithography2025

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2025Patents assigned to BEIJING U PREC TECH CO LTD (1)· patent assignee history
2025Patents assigned to UNIV TSINGHUA (1)· patent assignee history
2025Based in CN· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
BEIJING U PREC TECH CO LTD12025
UNIV TSINGHUA12025
Locations
LocationPatentsSpan
CN12025