Inventor
TOSHIHIRO NISHISAKA
Inventor
JP
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices40%
H05GX-ray technique40%
H01LSemiconductor devices10%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1010%
PatentTitleYear
11,789,374Extreme ultraviolet light generation apparatus and electronic device manufacturing method202311,452,196EUV chamber apparatus, extreme ultraviolet light generation system, and electronic device manufacturing method202211,363,706Target supply device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method202211,320,740Target supply device, target supply method, and electronic device manufacturing method2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2023Patents assigned to GIGAPHOTON INC (4)· patent assignee history
2022–2023Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| GIGAPHOTON INC | 4 | 2022–2023 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 4 | 2022–2023 |