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Inventor

Michael Blume

Inventor
Jena, DE

Overview

4→
Patents
1993–2013
Patent span
Performing operations
Primary field (CPC B)

Patents· 4 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps33%
B41JTypewriters17%
B82YSpecific uses or applications of nanostructures17%
G01DMeasuring not specially adapted for a specific variable17%
G02BOptical elements, systems or apparatus17%
PatentTitleYear
8,598,559'Systems and methods for beam splitting for imaging'20136,774,375'Method and apparatus for forming a curved polyline on a radiation-sensitive resist'20046,635,884'Method for directing an electron beam onto a target position on a substrate surface'20035,219,233'Process for controlling the operation of a print head'1993

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1993Patents assigned to SIEMENS NIXDORF INF SYST (1)· patent assignee history
1993Based in Berlin, DE· patent location history
2003–2004Patents assigned to LEICA MICROSYS LITHOGRAPHY LTD (2)· patent assignee history
2003–2004Based in Jena, DE· patent location history
2013Patents assigned to BLUME KIMBERLY M (1)· patent assignee history
2013Patents assigned to NORTHROP GRUMMAN SYSTEMS CORP (1)· patent assignee history
2013Patents assigned to SMITH SCOT T (1)· patent assignee history
2013Based in Oviedo, FL, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
LEICA MICROSYS LITHOGRAPHY LTD22003–2004
BLUME KIMBERLY M12013
NORTHROP GRUMMAN SYSTEMS CORP12013
SIEMENS NIXDORF INF SYST11993
SMITH SCOT T12013
Locations
LocationPatentsSpan
Jena, DE22003–2004
Oviedo, Florida, US12013
Berlin, DE11993