Inventor
Walter Schoenleber
Inventor
Holzgerlingen, DE
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B24Bprimary
B24BMachines, devices, or processes for grinding or polishing39%
B24DTools for grinding, buffing or sharpening22%
G01BMeasuring length, thickness or similar linear dimensions22%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1011%
B82YSpecific uses or applications of nanostructures6%
PatentTitleYear
7,086,929'Endpoint detection with multiple light beams'20067,018,271'Method for monitoring a substrate during chemical mechanical polishing'20066,986,699'Method and apparatus for determining polishing endpoint with multiple light sources'20066,764,380'Method and apparatus for measuring substrate layer thickness during chemical mechanical polishing'20046,524,165'Method and apparatus for measuring substrate layer thickness during chemical mechanical polishing'20036,247,998'Method and apparatus for determining substrate layer thickness during chemical mechanical polishing'20016,221,784'Method and apparatus for sequentially etching a wafer using anisotropic and isotropic etching'20016,159,073'Method and apparatus for measuring substrate layer thickness during chemical mechanical polishing'2000Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2000–2006Patents assigned to APPLIED MATERIALS INC (8)· patent assignee history
2000–2006Based in Holzgerlingen, DE· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 8 | 2000–2006 |
Locations
| Location | Patents | Span |
|---|---|---|
| Holzgerlingen, DE | 8 | 2000–2006 |