Inventor
Xinan LUO
Inventor
US
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps80%
G01NInvestigating or analysing materials by determining their chemical or physical properties20%
PatentTitleYear
12,469,668Systems and methods for compensating dispersion of a beam separator in a single-beam or multi-beam apparatus202511,961,698Replaceable module for a charged particle apparatus202411,614,416System and method for aligning electron beams in multi-beam inspection apparatus202311,328,894Systems and methods for compensating dispersion of a beam separator in a single-beam or multi-beam apparatus2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to ASML NETHERLANDS BV (4)· patent assignee history
2022Patents assigned to HERMES MICROVISION INC (1)· patent assignee history
2022–2025Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 4 | 2022–2025 |
| HERMES MICROVISION INC | 1 | 2022 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 4 | 2022–2025 |