Inventor
Sasangan Ramanathan
Inventor
San Ramon, CA, US
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material35%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1026%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1017%
B01DSeparation4%
B82YSpecific uses or applications of nanostructures4%
C04BLime, magnesia4%
C25DProcesses for the electrolytic or electrophoretic production of coatings4%
H01LSemiconductor devices4%
PatentTitleYear
9,159,608'Method for forming TiSiN thin film layer by using atomic layer deposition'20157,981,473'Transient enhanced atomic layer deposition'20116,951,765'Method and apparatus for introduction of solid precursors and reactants into a supercritical fluid reactor'20056,887,781'Method for the formation of diffusion barrier'20056,720,259'Passivation method for improved uniformity and repeatability for atomic layer deposition and chemical vapor deposition'20046,589,887'Forming metal-derived layers by simultaneous deposition and evaporation of metal'20036,071,555'Ferroelectric thin film composites made by metalorganic decomposition'20006,015,759'Surface modification of semiconductors using electromagnetic radiation'20005,887,117'Flash evaporator'1999Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1999Based in Blacksburg, VA, US· patent location history
2000Patents assigned to QUESTER TECHNOLOGY INC (1)· patent assignee history
2000–2015Based in San Ramon, CA, US· patent location history
2003–2005Patents assigned to NOVELLUS SYSTEMS INC (3)· patent assignee history
2004Patents assigned to GENUS INC (1)· patent assignee history
2011Patents assigned to AIXTRON INC (1)· patent assignee history
2015Patents assigned to AIXTRON SE (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| NOVELLUS SYSTEMS INC | 3 | 2003–2005 |
| AIXTRON INC | 1 | 2011 |
| AIXTRON SE | 1 | 2015 |
| GENUS INC | 1 | 2004 |
| QUESTER TECHNOLOGY INC | 1 | 2000 |
Locations
| Location | Patents | Span |
|---|---|---|
| San Ramon, California, US | 8 | 2000–2015 |
| Blacksburg, Virginia, US | 1 | 1999 |