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Inventor

Koyo Morita

Inventor
Higashimurayama, JP

Overview

8→
Patents
1980–2004
Patent span
Physics
Primary field (CPC G)

Patents· 8 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices38%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1031%
B23KSoldering or unsoldering15%
B08BCleaning in general8%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h108%
PatentTitleYear
6,740,171'Manufacturing method of semiconductor integrated circuit device'20045,229,569'Laser machining apparatus and method of the same'19935,208,437'Method of cutting interconnection pattern with laser and apparatus thereof'19934,780,606'Projection aligner method utilizing monitoring of light quantity'19884,701,608'Projection aligner with a sensor for monitoring light quantity'19874,598,197'Projection aligner'19864,298,273'Projection aligner and method of positioning a wafer'19814,218,136'Method of and apparatus for aligning photomask'1980

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1980–1993Patents assigned to HITACHI LTD (7)· patent assignee history
1980–1988Based in Higashimurayama, JP· patent location history
1986Patents assigned to HITACHI OME ELECTRONIC CO (1)· patent assignee history
1987Patents assigned to HITACHI TOKYO ELECTRONICS (1)· patent assignee history
1988Patents assigned to HITACHI OME ELECTRONIC CO INC (1)· patent assignee history
1993Based in Yamanashi, JP· patent location history
2004Patents assigned to RENESAS TECH CORP (1)· patent assignee history
2004Based in Tachikawa, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
HITACHI LTD71980–1993
HITACHI OME ELECTRONIC CO11986
HITACHI OME ELECTRONIC CO INC11988
HITACHI TOKYO ELECTRONICS11987
RENESAS TECH CORP12004
Locations
LocationPatentsSpan
Higashimurayama, JP51980–1988
Yamanashi, JP21993
Tachikawa, JP12004