Inventor
Sushant S. Koshti
Inventor
Sunnyvale, CA, US
Overview
Patents· 12 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1038%
H01LSemiconductor devices24%
B08BCleaning in general3%
B65GTransport or storage devices, e.g. conveyors for loading or tipping, shop conveyor systems or pneumatic tube conveyors3%
B65HHandling thin or filamentary material, e.g. sheets, webs, cables3%
C23CCoating metallic material3%
G01FMeasuring volume, volume flow, mass flow or liquid level3%
G02FOptical devices or arrangements for the control of light by modification of the optical properties of the media of the elements involved therein3%
G05BControl or regulating systems in general3%
G05DSystems for controlling or regulating non-electric variables3%
PatentTitleYear
11,087,998Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods202110,971,381Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods202110,847,391Semiconductor device manufacturing platform with single and twinned processing chambers202010,409,295Methods and apparatus for enhanced flow detection repeatability of thermal-based mass flow controllers (MFCS)201910,199,256Methods and systems for improved mask processing201910,192,765Substrate processing systems, apparatus, and methods with factory interface environmental controls20199,177,842'Degassing apparatus adapted to process substrates in multiple tiers with second actuator'20158,886,354'Methods, systems and apparatus for rapid exchange of work material'20148,379,082'System, methods and apparatus for substrate carrier content verification using a material handling system'20138,356,968'Methods and apparatus for an efficient handshake between material handling and material processing devices for safe material transfer'20137,894,923'Methods and apparatus for sensing substrates in carriers'20117,577,487'Methods and apparatus for a band to band transfer module'2009Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2009–2021Patents assigned to APPLIED MATERIALS INC (11)· patent assignee history
2009–2021Based in Sunnyvale, CA, US· patent location history
2011–2015Patents assigned to KOSHTI SUSHANT S (5)· patent assignee history
2011–2014Patents assigned to SHAH VINAY K (4)· patent assignee history
2011–2015Patents assigned to ENGLHARDT ERIC A (3)· patent assignee history
2011Based in Santa Clara, CA, US· patent location history
2015Patents assigned to GILJUM RICHARD (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 11 | 2009–2021 |
| KOSHTI SUSHANT Sself | 5 | 2011–2015 |
| SHAH VINAY K | 4 | 2011–2014 |
| ENGLHARDT ERIC A | 3 | 2011–2015 |
| GILJUM RICHARD | 1 | 2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| Sunnyvale, California, US | 11 | 2009–2021 |
| Santa Clara, California, US | 1 | 2011 |