Inventor
SherJang Singh
Inventor
Clifton Park, NY, US
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices29%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1029%
H01LSemiconductor devices21%
B08BCleaning in general14%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h107%
PatentTitleYear
10,504,774Lithographic patterning to form fine pitch features201910,401,724Pellicle replacement in EUV mask flow201910,265,739Method and apparatus for treating substrates20199,662,684'Method and apparatus for treating substrates'20179,195,132'Mask structures and methods of manufacturing'2015Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2015–2019Patents assigned to GLOBALFOUNDRIES INC (3)· patent assignee history
2015–2019Based in Clifton Park, NY, US· patent location history
2017–2019Patents assigned to SUSS MICROTEC PHOTOMASK EQUIPMENT GMBH & CO KG (2)· patent assignee history
2017Patents assigned to DIETZE UWE (1)· patent assignee history
2017Patents assigned to DRESS PETER (1)· patent assignee history
2017Patents assigned to SINGH SHERJANG (1)· patent assignee history
2017Based in Guilderland, NY, US· patent location history
2019Based in Newburgh, NY, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| GLOBALFOUNDRIES INC | 3 | 2015–2019 |
| SUSS MICROTEC PHOTOMASK EQUIPMENT GMBH & CO KG | 2 | 2017–2019 |
| DIETZE UWE | 1 | 2017 |
| DRESS PETER | 1 | 2017 |
| SINGH SHERJANGself | 1 | 2017 |
Locations
| Location | Patents | Span |
|---|---|---|
| Clifton Park, New York, US | 3 | 2015–2019 |
| Newburgh, New York, US | 1 | 2019 |
| Guilderland, New York, US | 1 | 2017 |