Inventor
Isamu Sakuragi
Inventor
Nirasaki, JP
Overview
Patents· 3 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1027%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices18%
B24BMachines, devices, or processes for grinding or polishing9%
H01JElectric discharge tubes or discharge lamps9%
H01LSemiconductor devices9%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h109%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests9%
Y10TTechnical subjects covered by former us classification9%
PatentTitleYear
8,821,644'Bevel/backside polymer removing method and device, substrate processing apparatus and storage medium'20148,187,981'Substrate processing method, substrate processing system, and computer-readable storage medium'20128,021,564'Method for detecting an end point of resist peeling, method and apparatus for peeling resist, and computer-readable storage medium'2011Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2011–2014Patents assigned to TOKYO ELECTRON LTD (3)· patent assignee history
2011–2014Based in Nirasaki, JP· patent location history
2012–2014Patents assigned to SAKURAGI ISAMU (2)· patent assignee history
2012Patents assigned to KOBAYASHI NOBUYOSHI (1)· patent assignee history
2014Patents assigned to HIROKI TSUTOMU (1)· patent assignee history
2014Patents assigned to KITAMURA AKINORI (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 3 | 2011–2014 |
| SAKURAGI ISAMUself | 2 | 2012–2014 |
| HIROKI TSUTOMU | 1 | 2014 |
| KITAMURA AKINORI | 1 | 2014 |
| KOBAYASHI NOBUYOSHI | 1 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| Nirasaki, JP | 3 | 2011–2014 |