Inventor
Ruairidh MacCrimmon
Inventor
Arlington, MA, US
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1027%
C23FNon-mechanical removal of metallic material from surface20%
C23CCoating metallic material7%
G01BMeasuring length, thickness or similar linear dimensions7%
H01LSemiconductor devices7%
PatentTitleYear
9,324,567'Gas cluster ion beam etching process for etching Si-containing, Ge-containing, and metal-containing materials'20168,557,710'Gas cluster ion beam etching process for metal-containing materials'20138,512,586'Gas cluster ion beam etching process for achieving target etch process metrics for multiple materials'20138,513,138'Gas cluster ion beam etching process for Si-containing and Ge-containing materials'20138,298,432'Method and system for adjusting beam dimension for high-gradient location specific processing'20128,293,126'Method and system for multi-pass correction of substrate defects'20127,564,024'Methods and apparatus for assigning a beam intensity profile to a gas cluster ion beam used to process workpieces'2009Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2009–2016Patents assigned to TEL EPION INC (7)· patent assignee history
2009–2013Based in Arlington, MA, US· patent location history
2012–2013Patents assigned to MACCRIMMON RUAIRIDH (5)· patent assignee history
2013Patents assigned to OLSEN CHRISTOPHER K (3)· patent assignee history
2013Patents assigned to SHAO YAN (3)· patent assignee history
2013Patents assigned to TABAT MARTIN D (3)· patent assignee history
2016Based in Maynard, MA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TEL EPION INC | 7 | 2009–2016 |
| MACCRIMMON RUAIRIDHself | 5 | 2012–2013 |
| OLSEN CHRISTOPHER K | 3 | 2013 |
| SHAO YAN | 3 | 2013 |
| TABAT MARTIN D | 3 | 2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| Arlington, Massachusetts, US | 6 | 2009–2013 |
| Maynard, Massachusetts, US | 1 | 2016 |