Inventor
Hiroki Tsujikawa
Inventor
Kyoto, JP
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B08Bprimary
B08BCleaning in general28%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1028%
H01LSemiconductor devices21%
B01FMixing, e.g. dissolving, emulsifying or dispersing7%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests7%
B05BSpraying apparatus3%
C11DDetergent compositions3%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices3%
PatentTitleYear
10,786,836Substrate processing method and substrate processing apparatus202010,658,203Substrate processing apparatus and processing cup cleaning method202010,639,683Recovery piping cleaning method and substrate processing apparatus202010,622,225Substrate processing apparatus and nozzle cleaning method202010,290,511Substrate treatment apparatus and substrate treatment method201910,199,243Substrate processing method and substrate processing apparatus20197,422,641'Substrate cleaning apparatus and substrate cleaning method'20087,314,529'Substrate cleaning apparatus and substrate cleaning method'2008Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2008Patents assigned to DAINIPPON SCREEN MFG (2)· patent assignee history
2008–2020Based in Kyoto, JP· patent location history
2019–2020Patents assigned to SCREEN HOLDINGS CO LTD (6)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SCREEN HOLDINGS CO LTD | 6 | 2019–2020 |
| DAINIPPON SCREEN MFG | 2 | 2008 |
Locations
| Location | Patents | Span |
|---|---|---|
| Kyoto, JP | 8 | 2008–2020 |