Inventor
Orlando Escorcia
Inventor
Falls Church, VA, US
Overview
Patents· 13 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
C23CCoating metallic material13%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices10%
C01BNon-metallic elements8%
H01JElectric discharge tubes or discharge lamps8%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h108%
Y10TTechnical subjects covered by former us classification5%
B08BCleaning in general3%
C03CChemical composition of glasses, glazes or vitreous enamels3%
C09DCoating compositions, e.g. paints, varnishes or lacquers3%
PatentTitleYear
9,128,382'Plasma mediated ashing processes that include formation of a protective layer before and/or during the plasma mediated ashing process'20157,709,814'Apparatus and process for treating dielectric materials'20107,704,872'Ultraviolet assisted pore sealing of porous low k dielectric films'20107,678,682'Ultraviolet assisted pore sealing of porous low k dielectric films'20107,629,272'Ultraviolet assisted porogen removal and/or curing processes for forming porous low k dielectrics'20097,078,161'Plasma ashing process for removing photoresist and residues during ferroelectric device fabrication'20067,011,868'Fluorine-free plasma curing process for porous low-k materials'20066,951,823'Plasma ashing process'20056,913,796'Plasma curing process for porous low-k materials'20056,834,656'Plasma process for removing polymer and residues from substrates'20046,759,098'Plasma curing of MSQ-based porous low-k film materials'20046,756,085'Ultraviolet curing processes for advanced low-k materials'20046,630,406'Plasma ashing process'2003Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2003Patents assigned to AXCELIS TECHNOLOGIES (1)· patent assignee history
2003–2015Based in Falls Church, VA, US· patent location history
2004–2010Patents assigned to AXCELIS TECH INC (8)· patent assignee history
2004Patents assigned to AXCELIS TECHNOLOGY INC (1)· patent assignee history
2004Patents assigned to CHEMAT TECHNOLOGY INC (1)· patent assignee history
2005Patents assigned to DOW CORNING (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| AXCELIS TECH INC | 8 | 2004–2010 |
| AXCELIS TECHNOLOGIES | 1 | 2003 |
| AXCELIS TECHNOLOGY INC | 1 | 2004 |
| CHEMAT TECHNOLOGY INC | 1 | 2004 |
| DOW CORNING | 1 | 2005 |
Locations
| Location | Patents | Span |
|---|---|---|
| Falls Church, Virginia, US | 13 | 2003–2015 |