Inventor

Sung-Tae Je

Inventor

Yongin-si, KR

Overview

2013–2020

Patent span

Electricity

Primary field (CPC H)

Patents· 20 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

C23Cprimary

C23CCoating metallic material31%

H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1028%

H01LSemiconductor devices25%

C30BSingle-crystal growth7%

H01JElectric discharge tubes or discharge lamps5%

Y10TTechnical subjects covered by former us classification3%

H05HPlasma technique2%

PatentTitleYear

10,840,118Substrate processing apparatus and method for assembling tube assembly2020 10,793,949Substrate processing apparatus and substrate processing method using the same2020 10,741,396Substrate processing apparatus2020 10,622,228Substrate supporting unit, substrate processing apparatus, and method of manufacturing substrate supporting unit2020 10,593,545Method for substrate processing using exhaust ports2020 10,364,494Substrate processing apparatus2019 10,337,103Substrate processing apparatus2019 10,287,687Substrate processing device2019 10,199,225Substrate processing apparatus2019 10,192,760Substrate supporting unit, substrate processing apparatus, and method of manufacturing substrate supporting unit2019 10,161,036Substrate processing apparatus2018 10,145,012Substrate processing apparatus and substrate processing method2018 9,953,850Substrate processing apparatus including heat-shield plate2018 9,875,895Substrate processing apparatus including exhaust ports and substrate processing method2018 9,758,870'Substrate treatment apparatus, and method for controlling temperature of heater'2017 9,620,395'Apparatus for processing substrate for supplying reaction gas having phase difference'2017 9,593,415'Substrate processing apparatus including auxiliary gas supply port'2017 9,416,451'Substrate processing device equipped with semicircle shaped antenna'2016 8,771,418'Substrate-processing apparatus and substrate-processing method for selectively inserting diffusion plates'2014 8,528,499'Substrate processing apparatus and method'2013

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2013–2020Patents assigned to EUGENE TECHNOLOGY CO LTD (20)· patent assignee history

2013Patents assigned to JE SUNG-TAE (1)· patent assignee history

2013–2020Based in Gumi-si, KR· patent location history

2014–2016Patents assigned to JE SUNG TAE (2)· patent assignee history

2014Patents assigned to KIM KYOUNG HUN (1)· patent assignee history

2014Patents assigned to PARK CHAN YONG (1)· patent assignee history

2014–2018Based in Gyeonggi-do, KR· patent location history

2018–2020Based in Yongin-si, KR· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees

Assignee	Patents	Span
EUGENE TECHNOLOGY CO LTD	20	2013–2020
JE SUNG TAEself	2	2014–2016
JE SUNG-TAEself	1	2013
KIM KYOUNG HUN	1	2014
PARK CHAN YONG	1	2014

Locations

Location	Patents	Span
Yongin-si, KR	10	2018–2020
Gyeonggi-do, KR	7	2014–2018
Gumi-si, KR	3	2013–2020