LexDanaLexDanabeta
Inventor

Wladimir Franciscus Gerardus Maria Hertog

Inventor
Velden, NL

Overview

1→
Patents
2006
Patent span
Physics
Primary field (CPC G)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices100%
PatentTitleYear
7,072,021'Lithographic apparatus and device manufacturing method'2006

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2006Patents assigned to ASML NETHERLANDS BV (1)· patent assignee history
2006Based in Velden, NL· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
ASML NETHERLANDS BV12006
Locations
LocationPatentsSpan
Velden, NL12006