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Inventor

MASAYA ODAGIRI

Inventor
CN

Overview

1→
Patents
2025
Patent span
Electricity
Primary field (CPC H)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps33%
H01LSemiconductor devices33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
PatentTitleYear
12,191,114Semiconductor reaction chamber and atomic layer plasma etching apparatus2025

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2025Patents assigned to BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD (1)· patent assignee history
2025Based in CN· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD12025
Locations
LocationPatentsSpan
CN12025