Inventor

Tilmann Assmus

Inventor

Aalen, DE

Overview

2018

Patent span

Physics

Primary field (CPC G)

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G02Bprimary

G02BOptical elements, systems or apparatus25%

G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices25%

G21KHandling of particles or ionising radiation not otherwise provided for25%

H05GX-ray technique25%

PatentTitleYear

Assembled from patent assignee/location history and declaration credentials.

2018Patents assigned to ZEISS CARL SMT GMBH (1)· patent assignee history

2018Based in Aalen, DE· patent location history

Assignee and location history derived from the patent record.

Assignees

Assignee	Patents	Span
ZEISS CARL SMT GMBH	1	2018

Locations

Location	Patents	Span
Aalen, DE	1	2018