Inventor
Peng Shen
Inventor
Tsukuba, JP
Overview
Patents· 14 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices18%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1016%
C09KMaterials for miscellaneous applications, not provided for elsewhere8%
G06FElectric digital data processing8%
H04LTransmission of digital information, e.g. telegraphic communication8%
H05KPrinted circuits8%
F27BFurnaces, kilns, ovens or retorts in general5%
G11CStatic stores5%
H10DInorganic electric semiconductor devices5%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h105%
PatentTitleYear
11,024,513Methods for minimizing sidewall damage during low k etch processes202110,826,850Switch and data accessing method thereof202010,720,335Chemistries for TSV/MEMS/power device etching202010,655,207Atmospheric-pressure acetylene carburizing furnace202010,640,845High-pressure liquid-state or supercritical-state quenching apparatus202010,529,581SiN selective etch to SiO2 with non-plasma dry process for 3D NAND device applications202010,347,498Methods of minimizing plasma-induced sidewall damage during low K etch processes201910,270,714Switch and data accessing method thereof201910,216,658Refreshing of dynamic random access memory201910,103,031Chemistries for TSV/MEMS/power device etching20189,966,129Controller and control method for dynamic random access memory20189,892,932'Chemistries for TSV/MEMS/power device etching'20189,894,001'I/O circuit and data transmission control method'20189,730,331'Display panel motherboard and manufacturing method thereof'2017Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2017–2020Based in Beijing, CN· patent location history
2018–2020Patents assigned to AIR LIQUIDE (5)· patent assignee history
2018–2021Patents assigned to AIR LIQUIDE ELECTRONICS US LP (5)· patent assignee history
2018–2020Patents assigned to VIA ALLIANCE SEMICONDUCTOR CO LTD (5)· patent assignee history
2018–2020Patents assigned to AIR LIQUIDE AMERICAN (3)· patent assignee history
2018–2021Based in Tsukuba, JP· patent location history
2018Based in Shanghai, CN· patent location history
2020Patents assigned to SHANGHAI YIBAI IND FURNACES CO LTD (2)· patent assignee history
2020Based in Anqing, CN· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| AIR LIQUIDE | 5 | 2018–2020 |
| AIR LIQUIDE ELECTRONICS US LP | 5 | 2018–2021 |
| VIA ALLIANCE SEMICONDUCTOR CO LTD | 5 | 2018–2020 |
| AIR LIQUIDE AMERICAN | 3 | 2018–2020 |
| SHANGHAI YIBAI IND FURNACES CO LTD | 2 | 2020 |
Locations
| Location | Patents | Span |
|---|---|---|
| Tsukuba, JP | 6 | 2018–2021 |
| Beijing, CN | 5 | 2017–2020 |
| Anqing, CN | 2 | 2020 |
| Shanghai, CN | 1 | 2018 |