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Inventor

Pei-Chung Hsu

Inventor
Taipei, TW

Overview

1→
Patents
2014
Patent span
Physics
Primary field (CPC G)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices100%
PatentTitleYear
8,765,330'Phase shift mask for extreme ultraviolet lithography and method of fabricating same'2014

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2014Patents assigned to CHANG SHU-HAO (1)· patent assignee history
2014Patents assigned to CHEN CHIA-JEN (1)· patent assignee history
2014Patents assigned to HSU PEI-CHUNG (1)· patent assignee history
2014Patents assigned to LEE HSIN-CHANG (1)· patent assignee history
2014Patents assigned to LU YEN-CHENG (1)· patent assignee history
2014Based in Taipei, TW· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
CHANG SHU-HAO12014
CHEN CHIA-JEN12014
HSU PEI-CHUNGself12014
LEE HSIN-CHANG12014
LU YEN-CHENG12014
Locations
LocationPatentsSpan
Taipei, TW12014