Inventor
Jens Prochnau
Inventor
Oberkochen, DE
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G02Bprimary
G02BOptical elements, systems or apparatus40%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices36%
B29DProducing particular articles from plastics or from substances in a plastic state4%
F16CShafts4%
F16FSprings4%
G02CSpectacles4%
G21KHandling of particles or ionising radiation not otherwise provided for4%
H02NElectric machines not otherwise provided for4%
PatentTitleYear
11,029,606Optical element for the beam guidance of imaging light in projection lithography202110,809,636Optical arrangement, in particular lithography system202010,761,436Optical arrangement, in particular lithography system, with a transport lock202010,690,941Lens arrangement, in particular a spectacle glass arrangement and method for producing a lens arrangement202010,670,777Optical component and method for coating optical component202010,520,838Mounting arrangement for an optical imaging arrangement201910,095,126Moveably mounted component of projection exposure system, as well as device and method for movement limitation for same201810,007,186Optical arrangement of a microlithographic projection exposure apparatus20189,996,015Mirror module, in particular for a microlithographic projection exposure appararatus20189,804,500'Optical imaging arrangement with simplified manufacture'20179,632,421'Arrangement and lithography apparatus with arrangement'2017Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2017–2021Patents assigned to ZEISS CARL SMT GMBH (9)· patent assignee history
2017–2021Based in Oberkochen, DE· patent location history
2020Patents assigned to tooz technologies GmbH (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ZEISS CARL SMT GMBH | 9 | 2017–2021 |
| tooz technologies GmbH | 2 | 2020 |
Locations
| Location | Patents | Span |
|---|---|---|
| Oberkochen, DE | 11 | 2017–2021 |