Inventor
Martijn Houben
Inventor
's-Hertogenbosch, NL
Overview
Patents· 28 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices38%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1029%
H01LSemiconductor devices19%
B32BLayered products, i.e. products built-up of strata of flat or non-flat, e.g. cellular or honeycomb, form3%
C09JAdhesives3%
H05BElectric heating3%
Y10TTechnical subjects covered by former us classification3%
B23HWorking of metal by the action of a high concentration of electric current on a workpiece using an electrode which takes the place of a tool1%
G03BApparatus or arrangements for taking photographs or for projecting or viewing them1%
PatentTitleYear
10,747,125Support apparatus, lithographic apparatus and device manufacturing method202010,747,126Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method202010,705,426Extraction body for lithographic apparatus202010,656,536Substrate support, method for loading a substrate on a substrate support location, lithographic apparatus and device manufacturing method202010,520,837Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method201910,481,502Object holder and lithographic apparatus201910,453,734Substrate holder, a lithographic apparatus and method of manufacturing devices201910,324,382Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method201910,120,292Support apparatus, lithographic apparatus and device manufacturing method20189,971,252Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method20189,946,172System for positioning an object in lithography20189,939,736Substrate holder and support table for lithography20189,915,877'Object holder and lithographic apparatus'20189,897,928'Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method'20189,835,957Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method20179,785,055'Object holder and lithographic apparatus'20179,740,110'Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method'20179,575,419'Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method'20179,507,275'Support apparatus, lithographic apparatus and device manufacturing method'20169,280,063'Substrate table assembly, an immersion lithographic apparatus and a device manufacturing method'20169,019,476'Lithographic apparatus and device manufacturing method'20158,970,822'Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method'20158,823,919'Lithographic apparatus, removable member and device manufacturing method'20148,659,741'Lithographic apparatus, removable member and device manufacturing method'20148,619,258'Lithographic apparatus and device manufacturing method'20138,384,882'Calibration method and lithographic apparatus for calibrating an optimum take over height of a substrate'20138,269,949'Lithographic apparatus and device manufacturing method'20127,978,308'Lithographic apparatus and device manufacturing method'2011Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2011–2020Patents assigned to ASML NETHERLANDS BV (28)· patent assignee history
2011–2020Based in 's-Hertogenbosch, NL· patent location history
2012–2018Patents assigned to HOUBEN MARTIJN (9)· patent assignee history
2012–2015Patents assigned to COMPEN RENE THEODORUS PETRUS (3)· patent assignee history
2015–2018Patents assigned to DERKS SANDER CATHARINA REINIER (3)· patent assignee history
2015–2018Patents assigned to KUNNEN JOHAN GERTRUDIS CORNELIS (3)· patent assignee history
2017Based in Veldhoven, NL· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 28 | 2011–2020 |
| HOUBEN MARTIJNself | 9 | 2012–2018 |
| COMPEN RENE THEODORUS PETRUS | 3 | 2012–2015 |
| DERKS SANDER CATHARINA REINIER | 3 | 2015–2018 |
| KUNNEN JOHAN GERTRUDIS CORNELIS | 3 | 2015–2018 |
Locations
| Location | Patents | Span |
|---|---|---|
| 's-Hertogenbosch, NL | 27 | 2011–2020 |
| Veldhoven, NL | 1 | 2017 |