Inventor
Franz Sorg
Inventor
Aalen, DE
Overview
Patents· 32 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices43%
G02BOptical elements, systems or apparatus37%
F16HGearing4%
G11BInformation storage based on relative movement between record carrier and transducer4%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h104%
B60WConjoint control of vehicle sub-units of different type or different function3%
F16FSprings3%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests1%
PatentTitleYear
11,003,088Method and device for the correction of imaging defects202110,620,543Method and device for the correction of imaging defects202010,509,336Optical assembly having a thermally conductive component201910,345,710Microlithographic projection exposure apparatus and measuring device for a projection lens201910,197,925Optical module for a microlithography objective holding optical elements with supporting devices located in a non-equidistant manner20199,977,228Optical module for a microlithography objective holding optical elements with supporting device located in non-equidistant manner20189,436,095'Exposure apparatus and measuring device for a projection lens'20169,081,296'Replacement apparatus for an optical element'20158,902,519'Replacement apparatus for an optical element'20148,711,331'Optical module for a microlithography objective including holding and supporting devices'20148,659,745'Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations'20148,582,081'Device for the low-deformation replaceable mounting of an optical element'20138,542,346'Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations'20138,488,104'Projection objective with diaphragms'20138,488,261'Replacement apparatus for an optical element'20138,330,935'Exposure apparatus and measuring device for a projection lens'20128,159,648'Method and device for the correction of imaging defects'20127,995,296'Replacement apparatus for an optical element'20117,959,536'Method for shifting a motor vehicle automatic transmission with a hydrodynamic torque converter when the vehicle comes to a stop'20117,768,723'Replacement apparatus for an optical element'20107,760,327'Reflecting optical element with eccentric optical passageway'20107,724,351'Lithographic apparatus, device manufacturing method and exchangeable optical element'20107,529,046'Optical element'20097,515,363'Replacement apparatus for an optical element'20097,471,469'Device for the low-deformation replaceable mounting of an optical element'20087,265,917'Replacement apparatus for an optical element'20077,131,931'Gearbox control system'20066,897,599'System for damping oscillations'20056,844,994'Optical element deformation system'20056,700,715'Oscillation damping system'20046,449,550'Method for motor reduction while closing the bridging clutch of an automatic transmission for vehicles'20026,441,975'Device for the low-deformation support of an optical element and method for the low-deformation support of the optical element'2002Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2002–2021Based in Aalen, DE· patent location history
2002–2011Based in Langenargen, DE· patent location history
2004–2010Patents assigned to ZEISS CARL SMT AG (10)· patent assignee history
2009–2014Based in Oberkochen, DE· patent location history
2011–2021Patents assigned to ZEISS CARL SMT GMBH (18)· patent assignee history
2012–2014Patents assigned to SORG FRANZ (7)· patent assignee history
2012–2014Patents assigned to KUGLER JENS (4)· patent assignee history
2012–2013Patents assigned to LOERING ULRICH (3)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ZEISS CARL SMT GMBH | 18 | 2011–2021 |
| ZEISS CARL SMT AG | 10 | 2004–2010 |
| SORG FRANZself | 7 | 2012–2014 |
| KUGLER JENS | 4 | 2012–2014 |
| LOERING ULRICH | 3 | 2012–2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| Aalen, DE | 26 | 2002–2021 |
| Oberkochen, DE | 3 | 2009–2014 |
| Langenargen, DE | 3 | 2002–2011 |