Inventor
Tzu-Yang Wu
Inventor
Hsinchu, TW
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B81Cprimary
B81CProcesses or apparatus specially adapted for the manufacture or treatment of microstructural devices or systems23%
G02BOptical elements, systems or apparatus23%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1015%
B81BMicrostructural devices or systems, e.g. micromechanical devices8%
C03CChemical composition of glasses, glazes or vitreous enamels8%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices8%
H10DInorganic electric semiconductor devices8%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h108%
PatentTitleYear
7,838,386'Method and system for patterning alignment marks on a transparent substrate'20107,611,960'Method and system for wafer backside alignment'20097,494,830'Method and device for wafer backside alignment overlay accuracy'20097,450,296'Method and system for patterning alignment marks on a transparent substrate'20087,294,279'Method for releasing a micromechanical structure'20077,205,176'Surface MEMS mirrors with oxide spacers'20077,183,171'Pyramid-shaped capacitor structure'2007Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2007–2010Patents assigned to TAIWAN SEMICONDUCTOR MFG (7)· patent assignee history
2007–2010Based in Hsinchu, TW· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG | 7 | 2007–2010 |
Locations
| Location | Patents | Span |
|---|---|---|
| Hsinchu, TW | 7 | 2007–2010 |