Inventor
Shun-Li Lin
Inventor
Hsinchu, TW
Overview
Patents· 12 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices47%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1024%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1018%
H10BElectronic memory devices6%
H10DInorganic electric semiconductor devices6%
PatentTitleYear
7,683,487'Structure applied to a photolithographic process'20107,586,609'Method for analyzing overlay errors'20097,157,215'Photoresist with adjustable polarized light reaction and photolithography process using the photoresist'20077,132,334'Methods of code programming a mask ROM device'20067,008,870'Structure applied to a photolithographic process and method for fabricating a semiconductor device'20066,975,974'Overlay error model, sampling strategy and associated equipment for implementation'20056,960,411'Mask with extended mask clear-out window and method of dummy exposure using the same'20056,660,458'Method of optical proximity correction'20036,627,388'Method for reducing roughness of photoresist through cross-linking reaction of deposit and photoresist'20036,576,407'Method of improving astigmatism of a photoresist layer'20036,563,127'Optical proximity correction with rectangular contact'20036,348,384'Method of using organic polymer as covering layer for device lightly doped drain structure'2002Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2002–2010Patents assigned to MACRONIX INT CO LTD (12)· patent assignee history
2002–2010Based in Hsinchu, TW· patent location history
2003Based in Yunlin County, TW· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| MACRONIX INT CO LTD | 12 | 2002–2010 |
Locations
| Location | Patents | Span |
|---|---|---|
| Hsinchu, TW | 10 | 2002–2010 |
| Yunlin County, TW | 2 | 2003 |