Inventor
Hiroyuki Yashiki
Inventor
Kyoto, JP
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1038%
H01LSemiconductor devices25%
B05BSpraying apparatus13%
B08BCleaning in general13%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests13%
PatentTitleYear
10,639,665Substrate processing apparatus and standby method for ejection head202010,586,693Substrate processing apparatus and substrate processing method20209,721,814'Substrate processing apparatus'20178,888,925'Nozzle, substrate processing apparatus, and substrate processing method'20147,935,217'Substrate processing apparatus for treating substrate with predetermined processing by supplying processing liquid to rim portion of rotating substrate'20117,547,181'Substrate position correcting method and apparatus using either substrate radius or center of rotation correction adjustment sum'2009Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2009–2017Patents assigned to DAINIPPON SCREEN MFG (3)· patent assignee history
2009–2020Based in Kyoto, JP· patent location history
2014–2020Patents assigned to SCREEN HOLDINGS CO LTD (4)· patent assignee history
2014Patents assigned to HIGUCHI AYUMI (1)· patent assignee history
2014Patents assigned to SATO MASANOBU (1)· patent assignee history
2014Patents assigned to TAKEAKI REI (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SCREEN HOLDINGS CO LTD | 4 | 2014–2020 |
| DAINIPPON SCREEN MFG | 3 | 2009–2017 |
| HIGUCHI AYUMI | 1 | 2014 |
| SATO MASANOBU | 1 | 2014 |
| TAKEAKI REI | 1 | 2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Kyoto, JP | 6 | 2009–2020 |