Inventor
Noriaki Yokono
Inventor
Kyoto, JP
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1060%
G01NInvestigating or analysing materials by determining their chemical or physical properties20%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices20%
PatentTitleYear
8,477,301'Substrate processing apparatus, substrate processing system and inspection/periphery exposure apparatus'20136,963,789'Substrate processing apparatus control system and substrate processing apparatus'20056,053,058'Atmosphere concentration monitoring for substrate processing apparatus and life determination for atmosphere processing unit of substrate processing apparatus'20005,436,848'Method of and device for transporting semiconductor substrate in semiconductor processing system'1995Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1995–2005Patents assigned to DAINIPPON SCREEN MFG (3)· patent assignee history
1995–2013Based in Kyoto, JP· patent location history
2013Patents assigned to AKIYAMA KAZUYA (1)· patent assignee history
2013Patents assigned to INAGAKI YUKIHIKO (1)· patent assignee history
2013Patents assigned to KASHIYAMA MASAHITO (1)· patent assignee history
2013Patents assigned to SOKUDO CO LTD (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| DAINIPPON SCREEN MFG | 3 | 1995–2005 |
| AKIYAMA KAZUYA | 1 | 2013 |
| INAGAKI YUKIHIKO | 1 | 2013 |
| KASHIYAMA MASAHITO | 1 | 2013 |
| SOKUDO CO LTD | 1 | 2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| Kyoto, JP | 4 | 1995–2013 |