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Inventor

Kouichirou Komatsu

Inventor
Tokyo, JP

Overview

3→
Patents
1993–1997
Patent span
Physics
Primary field (CPC G)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices75%
G01BMeasuring length, thickness or similar linear dimensions25%
PatentTitleYear
5,689,339'Alignment apparatus'19975,506,684'Projection scanning exposure apparatus with synchronous mask/wafer alignment system'19965,184,196'Projection exposure apparatus'1993

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1993–1997Patents assigned to NIKON CORP (3)· patent assignee history
1993–1997Based in Tokyo, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
NIKON CORP31993–1997
Locations
LocationPatentsSpan
Tokyo, JP31993–1997