Inventor
Wolfgang Vollrath
Inventor
Burbach, DE
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G01Nprimary
G01NInvestigating or analysing materials by determining their chemical or physical properties36%
G02BOptical elements, systems or apparatus27%
G01BMeasuring length, thickness or similar linear dimensions9%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices9%
H01LSemiconductor devices9%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h109%
PatentTitleYear
9,645,097'In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning'20178,451,440'Apparatus for the optical inspection of wafers'20138,089,622'Device and method for evaluating defects in the edge area of a wafer and use of the device in inspection system for wafers'20127,375,792'Apparatus for measuring feature widths on masks for the semiconductor industry'20087,268,867'Apparatus and method for inspecting a semiconductor component'20076,624,930'Illumination device for a DUV microscope and DUV microscope'20035,440,422'Method for manufacturing ultraviolet microscope dry objectives and microscope objectives manufactured in accordance with this method'1995Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1995Based in Burbach-Oberdresselndorf, DE· patent location history
2003–2008Patents assigned to LEICA MICROSYSTEMS (2)· patent assignee history
2003–2017Based in Burbach, DE· patent location history
2007–2012Patents assigned to VISTEC SEMICONDUCTOR SYS GMBH (2)· patent assignee history
2012–2013Patents assigned to VOLLRATH WOLFGANG (2)· patent assignee history
2012Patents assigned to BIRKNER ANDREAS (1)· patent assignee history
2013Patents assigned to BACKHAUSS HENNING (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LEICA MICROSYSTEMS | 2 | 2003–2008 |
| VISTEC SEMICONDUCTOR SYS GMBH | 2 | 2007–2012 |
| VOLLRATH WOLFGANGself | 2 | 2012–2013 |
| BACKHAUSS HENNING | 1 | 2013 |
| BIRKNER ANDREAS | 1 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| Burbach, DE | 6 | 2003–2017 |
| Burbach-Oberdresselndorf, DE | 1 | 1995 |