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Inventor

Putra Saputra

Inventor
Delft, NL

Overview

1→
Patents
2018
Patent span
Physics
Primary field (CPC G)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices100%
PatentTitleYear
9,939,738Lithographic apparatus and an object positioning system2018

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2018Patents assigned to ASML NETHERLANDS BV (1)· patent assignee history
2018Based in Delft, NL· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
ASML NETHERLANDS BV12018
Locations
LocationPatentsSpan
Delft, NL12018