LexDanaLexDanabeta
Inventor

Akira Shuhara

Inventor
Hyogo, JP

Overview

3→
Patents
1989–1992
Patent span
Electricity
Primary field (CPC H)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G21Kprimary
G21KHandling of particles or ionising radiation not otherwise provided for33%
H01JElectric discharge tubes or discharge lamps33%
C23CCoating metallic material17%
H05HPlasma technique17%
PatentTitleYear
5,097,793'Thin film vacuum evaporation device'19924,916,311'Ion beaming irradiating apparatus including ion neutralizer'19904,886,971'Ion beam irradiating apparatus including ion neutralizer'1989

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1989–1992Patents assigned to MITSUBISHI ELECTRIC CORP (3)· patent assignee history
1989–1990Based in Hyogo, JP· patent location history
1992Based in Amagasaki, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
MITSUBISHI ELECTRIC CORP31989–1992
Locations
LocationPatentsSpan
Hyogo, JP21989–1990
Amagasaki, JP11992