Inventor
Christian Wald
Inventor
Aalen, DE
Overview
Patents· 13 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices32%
G02BOptical elements, systems or apparatus12%
F04BPositive-displacement machines for liquids8%
G01NInvestigating or analysing materials by determining their chemical or physical properties8%
H02JElectric power networks8%
H02MApparatus for conversion between ac and ac, between ac and dc, or between dc and dc, and for use with mains or similar power supply systems8%
A61KPreparations for medical, dental or toiletry purposes4%
A61MDevices for introducing media into, or onto, the body4%
B01DSeparation4%
B82YSpecific uses or applications of nanostructures4%
PatentTitleYear
11,111,911Degassing apparatus202110,852,642Control apparatus and method for controlling a manipulator in respect of a microlithographic projection exposure apparatus202010,845,274Device having a micro fluid actuator202010,792,430Free-jet dosing system for applying a fluid into or under the skin202010,254,466Optical waveguide for guiding illumination light201910,241,423Method of operating a projection exposure tool for microlithography201910,135,272Switched mode power supply circuit201810,001,631Projection lens for EUV microlithography, film element and method for producing a projection lens comprising a film element20189,939,730Optical assembly20189,887,564'Switched mode power supply circuit'20189,841,685'Determination of a corrected variable'20179,671,548'Optical waveguide for guiding illumination light'20179,442,381'Method of operating a projection exposure tool for microlithography'2016Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2016–2020Patents assigned to ZEISS CARL SMT GMBH (8)· patent assignee history
2016–2020Based in Aalen, DE· patent location history
2018Patents assigned to INFINEON TECHNOLOGIES AUSTRIA AG (2)· patent assignee history
2018Based in Dietramszell, DE· patent location history
2020–2021Patents assigned to FRAUNHOFER GES FORSCHUNG (3)· patent assignee history
2020–2021Based in Munich, DE· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ZEISS CARL SMT GMBH | 8 | 2016–2020 |
| FRAUNHOFER GES FORSCHUNG | 3 | 2020–2021 |
| INFINEON TECHNOLOGIES AUSTRIA AG | 2 | 2018 |
Locations
| Location | Patents | Span |
|---|---|---|
| Aalen, DE | 8 | 2016–2020 |
| Munich, DE | 3 | 2020–2021 |
| Dietramszell, DE | 2 | 2018 |