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Inventor

Tadashi Maegawa

Inventor
Kyoto, JP

Overview

5→
Patents
1997–2020
Patent span
Electricity
Primary field (CPC H)

Patents· 5 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1044%
H01LSemiconductor devices22%
B05CApparatus for applying fluent materials to surfaces, in general11%
C02FTreatment of water, waste water, sewage, or sludge11%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests11%
PatentTitleYear
10,727,091Substrate processing apparatus202010,438,821Substrate processing apparatus20198,608,864'Substrate treating method'20137,422,681'Substrate treating apparatus'20085,656,088'Apparatus for dipping substrates in processing fluid'1997

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1997–2013Patents assigned to DAINIPPON SCREEN MFG (3)· patent assignee history
1997Based in Shiga, JP· patent location history
2008–2020Based in Kyoto, JP· patent location history
2013Patents assigned to HAYASHI TOYOHIDE (1)· patent assignee history
2013Patents assigned to KIMURA MASAHIRO (1)· patent assignee history
2013Patents assigned to MAEGAWA TADASHI (1)· patent assignee history
2019–2020Patents assigned to SCREEN HOLDINGS CO LTD (2)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
DAINIPPON SCREEN MFG31997–2013
SCREEN HOLDINGS CO LTD22019–2020
HAYASHI TOYOHIDE12013
KIMURA MASAHIRO12013
MAEGAWA TADASHIself12013
Locations
LocationPatentsSpan
Kyoto, JP42008–2020
Shiga, JP11997