Inventor
HARUYUKI NOMURA
Inventor
JP
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps46%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices31%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1015%
H01LSemiconductor devices8%
PatentTitleYear
12,580,148Multi charged particle beam writing apparatus202612,482,630Multiple charged particle beam writing apparatus, multiple charged particle beam writing method, and computer readable recording media storing program202512,456,601Charged particle beam writing method, charged particle beam writing apparatus, and computer-readable recording medium202512,249,483Charged particle beam writing method and charged particle beam writing apparatus202511,961,708Charged particle beam writing apparatus, charged particle beam writing method, and a non-transitory computer-readable storage medium202411,804,361Charged particle beam writing method, charged particle beam writing apparatus, and computer-readable recording medium2023Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2023–2026Patents assigned to NUFLARE TECHNOLOGY INC (6)· patent assignee history
2023–2026Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| NUFLARE TECHNOLOGY INC | 6 | 2023–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 6 | 2023–2026 |