Inventor
Shoichiro Matsuyama
Inventor
Nirasaki, JP
Overview
Patents· 16 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps38%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1035%
H01LSemiconductor devices12%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h106%
C23CCoating metallic material3%
H05HPlasma technique3%
H10BElectronic memory devices3%
PatentTitleYear
10,879,050Plasma processing apparatus, electrostatic attraction method, and electrostatic attraction program20209,390,943'Substrate processing apparatus'20169,230,824'Method of manufacturing semiconductor device'20168,920,598'Electrode and plasma processing apparatus'20148,840,753'Plasma etching unit'20148,741,098'Table for use in plasma processing system and plasma processing system'20148,636,872'Upper electrode and plasma processing apparatus'20148,295,026'Electrostatic chuck and substrate processing apparatus having same'20128,293,655'Dry etching method'20128,284,538'Electrostatic chuck device'20127,922,862'Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method'20117,767,055'Capacitive coupling plasma processing apparatus'20107,625,494'Plasma etching method and plasma etching unit'20097,619,870'Electrostatic chuck'20097,585,386'Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method'20097,419,613'Method and device for plasma-etching organic material film'2008Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2008–2020Patents assigned to TOKYO ELECTRON LTD (16)· patent assignee history
2008–2014Patents assigned to TOSHIBA KK (4)· patent assignee history
2008–2014Based in Nirasaki, JP· patent location history
2009–2014Based in Yamanashi, JP· patent location history
2012–2014Patents assigned to MATSUYAMA SHOICHIRO (7)· patent assignee history
2012–2014Patents assigned to HIMORI SHINJI (2)· patent assignee history
2012–2014Patents assigned to HONDA MASANOBU (2)· patent assignee history
2014–2020Based in Miyagi, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 16 | 2008–2020 |
| MATSUYAMA SHOICHIROself | 7 | 2012–2014 |
| TOSHIBA KK | 4 | 2008–2014 |
| HIMORI SHINJI | 2 | 2012–2014 |
| HONDA MASANOBU | 2 | 2012–2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Nirasaki, JP | 9 | 2008–2014 |
| Miyagi, JP | 4 | 2014–2020 |
| Yamanashi, JP | 3 | 2009–2014 |