Inventor
Eswaranand Venkatasubramanian
Inventor
Santa Clara, CA, US
Overview
Patents· 13 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices24%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1024%
C23CCoating metallic material20%
H01JElectric discharge tubes or discharge lamps7%
H10BElectronic memory devices7%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h107%
C01BNon-metallic elements4%
H10DInorganic electric semiconductor devices4%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices2%
PatentTitleYear
11,094,533Doped and undoped vanadium oxides for low-k spacer applications202111,062,939High bias deposition of high quality gapfill202111,043,372High-density low temperature carbon films for hardmask and other patterning applications202111,043,375Plasma deposition of carbon hardmask202111,028,477Bottom-up gap-fill by surface poisoning treatment202110,954,129Diamond-like carbon as mandrel202110,910,381Multicolor approach to DRAM STI active cut patterning202110,840,088Low temperature high-quality dielectric films202010,745,282Diamond-like carbon film202010,504,727Thick tungsten hardmask films deposition on high compressive/tensile bow wafers201910,475,642Doped and undoped vanadium oxides for low-k spacer applications201910,403,502Boron doped tungsten carbide for hardmask applications201910,312,137Hardmask layer for 3D NAND staircase structure in semiconductor applications2019Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2019–2021Patents assigned to APPLIED MATERIALS INC (13)· patent assignee history
2019–2021Based in Santa Clara, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 13 | 2019–2021 |
Locations
| Location | Patents | Span |
|---|---|---|
| Santa Clara, California, US | 13 | 2019–2021 |