Inventor
Yoichi Kurono
Inventor
Beverly, MA, US
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1030%
H01JElectric discharge tubes or discharge lamps20%
C23CCoating metallic material10%
F17DPipe-line systems10%
G05DSystems for controlling or regulating non-electric variables10%
Y10TTechnical subjects covered by former us classification10%
H05HPlasma technique5%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests5%
PatentTitleYear
6,558,506'Etching system and etching chamber'20036,360,762'Method for feeding gases for use in semiconductor manufacturing'20026,210,482'Apparatus for feeding gases for use in semiconductor manufacturing'20015,779,803'Plasma processing apparatus'19985,578,164'Plasma processing apparatus and method'19965,440,206'Plasma processing apparatus comprising means for generating rotating magnetic field'19955,217,560'Vertical type processing apparatus'1993Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1993–2003Patents assigned to TOKYO ELECTRON LTD (7)· patent assignee history
1993Patents assigned to TEL SAGAMI LTD (1)· patent assignee history
1993Based in Tokyo, JP· patent location history
1995Patents assigned to TOKYO ELECTRON YAMANASHI AND D (1)· patent assignee history
1995Based in Nakakoma-gun, JP· patent location history
1996–1998Patents assigned to TEL YAMANISHI KK (2)· patent assignee history
1996–1998Based in Yamanashi, JP· patent location history
2001–2002Patents assigned to FUJIKIN KK (2)· patent assignee history
2001–2002Based in Beverly, MA, US· patent location history
2003Based in South Hamilton, MA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 7 | 1993–2003 |
| FUJIKIN KK | 2 | 2001–2002 |
| TEL YAMANISHI KK | 2 | 1996–1998 |
| TEL SAGAMI LTD | 1 | 1993 |
| TOKYO ELECTRON YAMANASHI AND D | 1 | 1995 |
Locations
| Location | Patents | Span |
|---|---|---|
| Beverly, Massachusetts, US | 2 | 2001–2002 |
| Yamanashi, JP | 2 | 1996–1998 |
| South Hamilton, Massachusetts, US | 1 | 2003 |
| Nakakoma-gun, JP | 1 | 1995 |
| Tokyo, JP | 1 | 1993 |