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Inventor

Pei-sheng TANG

Inventor
TW

Overview

5→
Patents
2023–2026
Patent span
Electricity
Primary field (CPC H)

Patents· 5 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Lprimary
H01LSemiconductor devices24%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1024%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices12%
H01JElectric discharge tubes or discharge lamps12%
H10DInorganic electric semiconductor devices12%
H10BElectronic memory devices6%
H10NElectric solid-state devices not otherwise provided for6%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h106%
PatentTitleYear
12,581,916Etch monitoring and performing202612,374,588Method for evaluating non-uniform stress202512,120,886Memory device and manufacturing method thereof202411,804,410Thin-film non-uniform stress evaluation202311,749,570Etch monitoring and performing2023

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2023–2026Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (5)· patent assignee history
2023–2026Based in TW· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TAIWAN SEMICONDUCTOR MFG CO LTD52023–2026
Locations
LocationPatentsSpan
TW52023–2026