Inventor
Chinedum E. Okwudire
Inventor
Ann Arbor, MI, US
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices25%
F16CShafts13%
F16MFrames, casings or beds of engines, machines or apparatus, not specific to engines, machines or apparatus provided for elsewhere13%
G01NInvestigating or analysing materials by determining their chemical or physical properties13%
G05BControl or regulating systems in general13%
H01LSemiconductor devices13%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1013%
PatentTitleYear
10,837,492Axially compliant bearing for precision positioning202010,585,414Use of filtered basis splines to compensate servo-induced motion errors202010,281,829Vibration-assisted positioning stage201910,077,865Magnet assisted stage for vibration and heat reduction in wafer scanning2018Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2018–2020Patents assigned to UNIV MICHIGAN REGENTS (4)· patent assignee history
2018–2020Based in Ann Arbor, MI, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| UNIV MICHIGAN REGENTS | 4 | 2018–2020 |
Locations
| Location | Patents | Span |
|---|---|---|
| Ann Arbor, MI, US | 4 | 2018–2020 |