Inventor
Frank Chilese
Inventor
San Ramon, CA, US
Overview
Patents· 14 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices25%
G01NInvestigating or analysing materials by determining their chemical or physical properties22%
G02BOptical elements, systems or apparatus13%
H05GX-ray technique9%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light6%
H01JElectric discharge tubes or discharge lamps6%
B08BCleaning in general3%
G21BFusion reactors3%
H01LSemiconductor devices3%
H05HPlasma technique3%
PatentTitleYear
10,893,599Laser produced plasma light source having a target material coated on a cylindrically-symmetric element202110,777,377Multi-column spacing for photomask and reticle inspection and wafer print check verification202010,438,769Array-based characterization tool201910,021,773Laser produced plasma light source having a target material coated on a cylindrically-symmetric element20189,810,991'System and method for cleaning EUV optical elements'20179,759,912'Particle and chemical control using tunnel flow'20179,544,984'System and method for generation of extreme ultraviolet light'20179,448,343'Segmented mirror apparatus for imaging and method of using the same'20169,348,214'Spectral purity filter and light monitor for an EUV reticle inspection system'20169,244,368'Particle control near reticle and optics using showerhead'20169,164,388'Temperature control in EUV reticle inspection tool'20158,917,432'Multiplexing EUV sources in reticle inspection'20148,414,688'Recirculation high purity system for protecting optical modules or inspection system during storage, transport and shipping'20137,050,170'Apparatus and method for maintaining uniform and stable temperature for cavity enhanced optical spectroscopy'2006Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2006–2021Based in San Ramon, CA, US· patent location history
2013–2021Patents assigned to KLA TENCOR CORP (13)· patent assignee history
2013–2016Patents assigned to CHILESE FRANK (4)· patent assignee history
2013Patents assigned to BRUNNER RUDOLF (1)· patent assignee history
2014–2015Patents assigned to WACK DANIEL (2)· patent assignee history
2016–2017Patents assigned to SANDIA CORP (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KLA TENCOR CORP | 13 | 2013–2021 |
| CHILESE FRANKself | 4 | 2013–2016 |
| SANDIA CORP | 2 | 2016–2017 |
| WACK DANIEL | 2 | 2014–2015 |
| BRUNNER RUDOLF | 1 | 2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| San Ramon, California, US | 14 | 2006–2021 |