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Inventor

Vinay Shah

Inventor
San Mateo, CA, US

Overview

30→
Patents
2006–2014
Patent span
Electricity
Primary field (CPC H)

Patents· 30 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1035%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests14%
Y02PClimate change mitigation technologies in the production or processing of goods9%
H10FInorganic semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation8%
Y02EReduction of greenhouse gas [ghg] emissions, related to energy generation, transmission or distribution8%
Y10TTechnical subjects covered by former us classification5%
B25JManipulators4%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices4%
B23KSoldering or unsoldering3%
B65GTransport or storage devices, e.g. conveyors for loading or tipping, shop conveyor systems or pneumatic tube conveyors3%
PatentTitleYear
8,911,193'Substrate processing sequence in a cartesian robot cluster tool'20148,886,354'Methods, systems and apparatus for rapid exchange of work material'20148,689,812'Methods and loadport for purging a substrate carrier'20148,672,121'Methods and apparatus for transporting substrate carriers'20148,601,975'Methods and loadport apparatus for purging a substrate carrier'20138,569,650'Laser material removal methods and apparatus'20138,379,082'System, methods and apparatus for substrate carrier content verification using a material handling system'20138,356,968'Methods and apparatus for an efficient handshake between material handling and material processing devices for safe material transfer'20138,318,512'Automated substrate handling and film quality inspection in solar cell processing'20128,309,374'Advanced platform for processing crystalline silicon solar cells'20128,258,426'Laser material removal methods and apparatus'20128,231,431'Solar panel edge deletion module'20128,207,005'Forming solar cells using a patterned deposition process'20128,074,597'Methods and apparatus for purging a substrate carrier'20118,066,466'Substrate processing sequence in a Cartesian robot cluster tool'20117,984,543'Methods for moving a substrate carrier'20117,951,637'Back contact solar cells using printed dielectric barrier'20117,894,923'Methods and apparatus for sensing substrates in carriers'20117,833,351'Batch processing platform for ALD and CVD'20107,798,764'Substrate processing sequence in a cartesian robot cluster tool'20107,778,721'Small lot size lithography bays'20107,720,558'Methods and apparatus for mapping carrier contents'20107,711,445'Systems and methods for transferring small lot size substrate carriers between processing tools'20107,651,306'Cartesian robot cluster tool architecture'20107,611,319'Methods and apparatus for identifying small lot size substrate carriers'20097,577,487'Methods and apparatus for a band to band transfer module'20097,374,393'Method of retaining a substrate during a substrate transferring process'20087,374,391'Substrate gripper for a substrate handling robot'20087,221,993'Systems and methods for transferring small lot size substrate carriers between processing tools'20077,107,125'Method and apparatus for monitoring the position of a semiconductor processing robot'2006

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2006–2014Patents assigned to APPLIED MATERIALS INC (29)· patent assignee history
2006–2012Based in San Francisco, CA, US· patent location history
2008–2014Based in San Mateo, CA, US· patent location history
2011–2014Patents assigned to SHAH VINAY K (12)· patent assignee history
2011–2014Patents assigned to ENGLHARDT ERIC (5)· patent assignee history
2011–2014Patents assigned to HUDGENS JEFFREY C (4)· patent assignee history
2011–2014Patents assigned to KOSHTI SUSHANT S (4)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
APPLIED MATERIALS INC292006–2014
SHAH VINAY Kself122011–2014
ENGLHARDT ERIC52011–2014
HUDGENS JEFFREY C42011–2014
KOSHTI SUSHANT S42011–2014
Locations
LocationPatentsSpan
San Mateo, California, US212008–2014
San Francisco, California, US92006–2012