Inventor
Akito Hatano
Inventor
Kyoto, JP
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices35%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1035%
B65DContainers for storage or transport of articles or materials, e.g. bags, barrels, bottles, boxes, cans, cartons, crates, drums, jars, tanks, hoppers, forwarding containers6%
B25JManipulators3%
B65GTransport or storage devices, e.g. conveyors for loading or tipping, shop conveyor systems or pneumatic tube conveyors3%
C03CChemical composition of glasses, glazes or vitreous enamels3%
C23CCoating metallic material3%
G01BMeasuring length, thickness or similar linear dimensions3%
G01VGeophysics3%
H10DInorganic electric semiconductor devices3%
PatentTitleYear
11,075,095Substrate processing apparatus202110,910,247Substrate container, load port apparatus, and substrate treating apparatus202110,748,795Substrate processing method and substrate processing apparatus202010,403,517Substrate processing apparatus201910,381,249Substrate container, load port apparatus, and substrate treating apparatus201910,332,761Substrate processing apparatus201910,297,476Substrate processing apparatus201910,115,588Substrate treating apparatus and substrate treating method20189,810,532'Substrate treating apparatus and substrate treating methods'20179,576,831'Substrate container, a load port apparatus, and a substrate treating apparatus'20179,449,861'Substrate processing apparatus'2016Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2016–2021Patents assigned to SCREEN HOLDINGS CO LTD (11)· patent assignee history
2016–2021Based in Kyoto, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SCREEN HOLDINGS CO LTD | 11 | 2016–2021 |
Locations
| Location | Patents | Span |
|---|---|---|
| Kyoto, JP | 11 | 2016–2021 |