Inventor
NAOKI TOYOMURA
Inventor
JP
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B08Bprimary
B08BCleaning in general23%
B24BMachines, devices, or processes for grinding or polishing23%
H01LSemiconductor devices23%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1023%
G01FMeasuring volume, volume flow, mass flow or liquid level8%
PatentTitleYear
12,350,787Substrate processing apparatus202511,846,536Sensor target cover used in combination with liquid level detection sensor, wet processing device, substrate processing device, and sensor assembly202311,731,240Substrate processing apparatus202311,195,736Substrate processing apparatus, method of detaching substrate from vacuum suction table of substrate processing apparatus, and method of placing substrate onto vacuum suction table of substrate processing apparatus2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021–2025Patents assigned to EBARA CORP (4)· patent assignee history
2021–2025Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| EBARA CORP | 4 | 2021–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 4 | 2021–2025 |