Inventor
Armen Avoyan
Inventor
Glendale, CA, US
Overview
Patents· 30 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B08Bprimary
B08BCleaning in general24%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1022%
H01JElectric discharge tubes or discharge lamps20%
C11DDetergent compositions9%
C23CCoating metallic material6%
B24BMachines, devices, or processes for grinding or polishing5%
H01LSemiconductor devices5%
Y10TTechnical subjects covered by former us classification2%
B23QDetails, components, or accessories for machine tools, e.g. arrangements for copying or controlling1%
C23GCleaning or de-greasing of metallic material by chemical methods other than electrolysis1%
PatentTitleYear
10,967,407Conditioning chamber component202110,391,526Electrostatic chuck cleaning fixture20199,748,078'Dual phase cleaning chambers and assemblies comprising the same'20179,623,449'Dielectric window cleaning apparatuses'20179,505,036'Portable sonic particle removal tool with a chemically controlled working fluid'20169,406,534'Wet clean process for cleaning plasma processing chamber components'20169,396,912'Methods for mixed acid cleaning of showerhead electrodes'20169,390,895'Gas injector particle removal process and apparatus'20169,293,305'Mixed acid cleaning assemblies'20169,245,719'Dual phase cleaning chambers and assemblies comprising the same'20169,120,201'Platen and adapter assemblies for facilitating silicon electrode polishing'20159,079,228'Methodology for cleaning of surface metal contamination from an upper electrode used in a plasma chamber'20158,945,317'System and method for cleaning gas injectors'20158,580,079'Electrode carrier assemblies'20138,550,880'Platen and adapter assemblies for facilitating silicon electrode polishing'20138,545,639'Method of cleaning aluminum plasma chamber parts'20138,444,456'Electrode securing platens and electrode polishing assemblies incorporating the same'20138,276,898'Electrode transporter and fixture sets incorporating the same'20128,276,604'Peripherally engaging electrode carriers and assemblies incorporating the same'20128,221,552'Cleaning of bonded silicon electrodes'20128,215,321'Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatuses'20128,171,877'Backside mounted electrode carriers and assemblies incorporating the same'20128,075,701'Processes for reconditioning multi-component electrodes'20118,075,703'Immersive oxidation and etching process for cleaning silicon electrodes'20118,022,718'Method for inspecting electrostatic chucks with Kelvin probe analysis'20117,942,973'Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatuses'20117,578,889'Methodology for cleaning of surface metal contamination from electrode assemblies'20097,052,553'Wet cleaning of electrostatic chucks'20066,919,689'Method for toolmatching and troubleshooting a plasma processing system'20056,873,114'Method for toolmatching and troubleshooting a plasma processing system'2005Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2005–2021Patents assigned to LAM RES CORP (30)· patent assignee history
2005–2021Based in Glendale, CA, US· patent location history
2011–2017Patents assigned to AVOYAN ARMEN (16)· patent assignee history
2011–2017Patents assigned to SHIH HONG (16)· patent assignee history
2011–2013Patents assigned to OUTKA DUANE (10)· patent assignee history
2011–2013Patents assigned to FANG YAN (5)· patent assignee history
2011–2019Based in Oakland, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 30 | 2005–2021 |
| AVOYAN ARMENself | 16 | 2011–2017 |
| SHIH HONG | 16 | 2011–2017 |
| OUTKA DUANE | 10 | 2011–2013 |
| FANG YAN | 5 | 2011–2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| Glendale, California, US | 20 | 2005–2021 |
| Oakland, California, US | 10 | 2011–2019 |